Traceable interferometry using binary reconfigurable holograms

Cashmore, M.T.; Hall, S.R.G.; Love, G.D.

doi:10.1364/ao.53.005353

Traceable interferometry using binary reconfigurable holograms

Cashmore, M.T.; Hall, S.R.G.; Love, G.D.

Authors

M.T. Cashmore

S.R.G. Hall

G.D. Love

Abstract

We describe the characterization of a ferroelectric-liquid-crystal-on-silicon (FLCOS) spatial light modulator (SLM) in the production of holograms for use in interferometric metrology. It has already been shown that such a device can be used in producing small-amplitude arbitrary reference surfaces with small but appreciable errors due to the contaminating effect of higher-order structures being propagated through the spatial filter. Here we further quantify the size of these residuals for increasingly large aberrations up to nine waves rms Zernike astigmatism, showing a Zernike-corrected rms wavefront error of roughly 0.06 waves with high vibrational stability. We also present measurements of a vacuum window element using the FLCOS device to drastically reduce interferometric fringe density, showing a residual wavefront error of 0.046 waves rms with dominant components originating from test piece structure rather than holographic errors.

Citation

Cashmore, M., Hall, S., & Love, G. (2014). Traceable interferometry using binary reconfigurable holograms. Applied Optics, 53(24), 5353-5358. https://doi.org/10.1364/ao.53.005353

Journal Article Type	Article
Acceptance Date	Jun 29, 2014
Online Publication Date	Aug 13, 2014
Publication Date	Aug 13, 2014
Deposit Date	Oct 1, 2014
Publicly Available Date	Oct 1, 2014
Journal	Applied Optics
Print ISSN	1559-128X
Electronic ISSN	2155-3165
Publisher	Optica
Peer Reviewed	Peer Reviewed
Volume	53
Issue	24
Pages	5353-5358
DOI	https://doi.org/10.1364/ao.53.005353

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Copyright Statement
This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: https://doi.org/10.1364/AO.53.005353. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.