Holographic Lithography

Purvis, A.; Toriz-Garcia, H.; Cowling, J.J.; Williams, G.L.; Seed, N.L.; McWilliam, R.; Soulard, F.B.; Ivey, P.A.

doi:10.1364/dh.2014.dw1b.1

Holographic Lithography

Purvis, A.; Toriz-Garcia, H.; Cowling, J.J.; Williams, G.L.; Seed, N.L.; McWilliam, R.; Soulard, F.B.; Ivey, P.A.

Authors

Alan Purvis alan.purvis@durham.ac.uk
College Mentor

H. Toriz-Garcia

J.J. Cowling

G.L. Williams

N.L. Seed

R. McWilliam

F.B. Soulard

P.A. Ivey

Abstract

This review summarises the work of the Durham-Sheffield, UK team working on Holographic Lithography over the last decade. It collates progress in 3D resolution and overall scale of the substrate wiring patterns designed and considers a range of approaches and applications.

Citation

Purvis, A., Toriz-Garcia, H., Cowling, J., Williams, G., Seed, N., McWilliam, R., …Ivey, P. (2014). Holographic Lithography. In Digital holography and three-dimensional imaging part of Imaging and applied optics 2014 ; 13-17 July 2014, Seattle, Washington, United States. https://doi.org/10.1364/dh.2014.dw1b.1

Conference Name	Imaging and Applied Optics 2014.
Conference Location	Seattle, Washington, United States
Start Date	Jul 13, 2014
End Date	Jul 17, 2014
Acceptance Date	Jan 1, 2014
Publication Date	Jul 17, 2014
Deposit Date	Jun 4, 2015
Publicly Available Date	Feb 5, 2016
Publisher	Optical Society of America (OSA)
Book Title	Digital holography and three-dimensional imaging part of Imaging and applied optics 2014 ; 13-17 July 2014, Seattle, Washington, United States.
DOI	https://doi.org/10.1364/dh.2014.dw1b.1
Additional Information	Conference dates: 13–17 July 2014