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High contrast pattern reconstructions using a phase-seeded point CGH method

McWilliam, Richard; Williams, Gavin; Cowling, Joshua; Seed, Luke; Purvis, Alan

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Authors

Richard McWilliam

Gavin Williams

Joshua Cowling

Luke Seed



Abstract

A major challenge encountered in digital holography applications is the need to synthesize computer-generated holograms (CGHs) that are realizable as phase-only elements while also delivering high quality reconstruction. This trade-off is particularly acute in high-precision applications such as photolithography where contrast typically must exceed 0.6. A seeded-phase point method is proposed to address this challenge, whereby patterns composed of fine lines that intersect and form closed shapes are reconstructed with high contrast while maintaining a phase-only CGH. The method achieves superior contrast to that obtained by uniform or random seeded-phase methods while maintaining computational efficiency for large area exposures. It is also shown that binary phase modulation achieves similar contrast performance with benefits for the fabrication of simpler diffractive optical elements.

Citation

McWilliam, R., Williams, G., Cowling, J., Seed, L., & Purvis, A. (2016). High contrast pattern reconstructions using a phase-seeded point CGH method. Applied Optics, 55(7), 1701-1710. https://doi.org/10.1364/ao.55.001701

Journal Article Type Article
Acceptance Date Jan 21, 2016
Online Publication Date Feb 26, 2016
Publication Date Feb 26, 2016
Deposit Date Jan 29, 2016
Publicly Available Date Feb 29, 2016
Journal Applied Optics
Print ISSN 1559-128X
Electronic ISSN 2155-3165
Publisher Optica
Peer Reviewed Peer Reviewed
Volume 55
Issue 7
Pages 1701-1710
DOI https://doi.org/10.1364/ao.55.001701
Related Public URLs https://www.osapublishing.org/ao/upcoming.cfm

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Publisher Licence URL
http://creativecommons.org/licenses/by/4.0/

Copyright Statement
Published by The Optical Society under the terms of the Creative Commons Attribution 4.0 License. Further distribution of this work must maintain attribution to the author(s) and the published article's title, journal citation, and DOI.





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