Cookies

We use cookies to ensure that we give you the best experience on our website. By continuing to browse this repository, you give consent for essential cookies to be used. You can read more about our Privacy and Cookie Policy.


Durham Research Online
You are in:

Non-planar photolithography using digital holograms.

McWilliam, R. and Purvis, A. and Johnson, S. and Maiden, A. and Williams, G. and Seed, L. and Ivey, P. (2006) 'Non-planar photolithography using digital holograms.', Frontiers in Optics 2006 : Laser Science XXII Rochester, New York, 8-12 October 2006.

Abstract

A photolithographic process using digital holograms enables the fine-pitch patterning of grossly non-planar substrates, with many potential applications in microelectronics packaging. Considerations of hologram design, fabrication and verification particular to the lithographic process are presented.

Item Type:Conference item (Paper)
Full text:Full text not available from this repository.
Publisher Web site:http://www.opticsinfobase.org/abstract.cfm?URI=FiO-2006-FWX6
Record Created:29 Jan 2007
Last Modified:10 Nov 2010 12:54

Social bookmarking: del.icio.usConnoteaBibSonomyCiteULikeFacebookTwitterExport: EndNote, Zotero | BibTex
Usage statisticsLook up in GoogleScholar | Find in a UK Library