Non-Planar Photolithography Using Digital Holograms

McWilliam, R.; Purvis, A.; Johnson, S.; Maiden, A.; Williams, G.; Seed, L.; Ivey, P.

Non-Planar Photolithography Using Digital Holograms

McWilliam, R.; Purvis, A.; Johnson, S.; Maiden, A.; Williams, G.; Seed, L.; Ivey, P.

Authors

R. McWilliam

Alan Purvis alan.purvis@durham.ac.uk
College Mentor

S. Johnson

A. Maiden

G. Williams

L. Seed

P. Ivey

Abstract

A photolithographic process using digital holograms enables the fine-pitch patterning of grossly non-planar substrates, with many potential applications in microelectronics packaging. Considerations of hologram design, fabrication and verification particular to the lithographic process are presented.

Citation

McWilliam, R., Purvis, A., Johnson, S., Maiden, A., Williams, G., Seed, L., & Ivey, P. (2006). Non-Planar Photolithography Using Digital Holograms.

Conference Name	Frontiers in Optics 2006 : Laser Science XXII
Conference Location	Rochester, New York
Start Date	Oct 8, 2006
End Date	Oct 12, 2006
Publication Date	2006-10
Deposit Date	Jan 29, 2007
Publisher	Optical Society of America (OSA)
Series Title	Frontiers in Optics
Publisher URL	http://www.opticsinfobase.org/abstract.cfm?URI=FiO-2006-FWX6
Additional Information	Conference dates: October 8-12, 2006.