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Non-planar photolithography using digital holograms.

McWilliam, R. and Purvis, A. and Johnson, S. and Maiden, A. and Williams, G. and Seed, L. and Ivey, P. (2006) 'Non-planar photolithography using digital holograms.', Frontiers in Optics 2006 : Laser Science XXII Rochester, New York, 8-12 October 2006.


A photolithographic process using digital holograms enables the fine-pitch patterning of grossly non-planar substrates, with many potential applications in microelectronics packaging. Considerations of hologram design, fabrication and verification particular to the lithographic process are presented.

Item Type:Conference item (Paper)
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Record Created:29 Jan 2007
Last Modified:10 Nov 2010 12:54

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