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High sensitivity love-mode liquid density sensors

Turton, A.C.; Bhattacharyya, D.; Wood, D.

Authors

A.C. Turton

D. Bhattacharyya

D. Wood



Abstract

An experimental study into Love-mode liquid sensors using polyimide for a waveguide layer has been carried out. Love devices were built on Y-ST quartz with 40 μm wavelength inter-digitated transducers operating up to 124.7 MHz, and polyimide layers between 0.65 and 1.5 μm thick. The optimum polyimide thickness was 0.85 μm exhibiting a minimum insertion loss of 16 dB. Surface corrugations from 2.5 μm wide and 0.5 μm deep were etched in the polyimide to discriminate the liquid density from the square root of the density–viscosity product. A maximum sensitivity of up to 0.36 μg cm−3 Hz−1 has been obtained, a higher value than found in most other studies.

Citation

Turton, A., Bhattacharyya, D., & Wood, D. (2005). High sensitivity love-mode liquid density sensors. Sensors and Actuators A: Physical, 123-24, 267-273. https://doi.org/10.1016/j.sna.2005.02.010

Journal Article Type Article
Publication Date 2005-09
Deposit Date Apr 23, 2008
Journal Sensors and Actuators A: Physical
Print ISSN 0924-4247
Publisher Elsevier
Peer Reviewed Peer Reviewed
Volume 123-24
Pages 267-273
DOI https://doi.org/10.1016/j.sna.2005.02.010
Keywords Love, Saw, Polyimide, Liquid density sensor wave acoustic sensors, Guiding layers, Devices, Viscosity, Design.