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Lithography-free high aspect ratio submicron quartz columns by reactive ion etching

Zeze, D.A.; Cox, D.C.; Weiss, B.L.; Silva, S.R.P.

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Authors

D.C. Cox

B.L. Weiss

S.R.P. Silva



Abstract

We describe lithography-free fabrication of sub-micron surface features on quartz substrates by the reactive ion etching (RIE) in a CF4/Ar atmosphere. These submicron glass columns are well defined, have a high aspect ratio, with the underlying substrate being very flat. The geometry of the fabricated surface columns is dependent on the RIE process parameters. The analysis of these glass columns shows that a differential etching process takes place. The optical characterization of these samples shows a significant absorption at visible wavelengths whereas the relative transmission is very high in the infrared range, suggesting that these samples could potentially be used for wavelength selection device applications.

Citation

Zeze, D., Cox, D., Weiss, B., & Silva, S. (2004). Lithography-free high aspect ratio submicron quartz columns by reactive ion etching. Applied Physics Letters, 84(8), 1362-1364. https://doi.org/10.1063/1.1647280

Journal Article Type Article
Publication Date Feb 23, 2004
Deposit Date Oct 24, 2006
Publicly Available Date Apr 21, 2011
Journal Applied Physics Letters
Print ISSN 0003-6951
Electronic ISSN 1077-3118
Publisher American Institute of Physics
Peer Reviewed Peer Reviewed
Volume 84
Issue 8
Pages 1362-1364
DOI https://doi.org/10.1063/1.1647280
Keywords Quartz, Sputter etching, Surface structure, Vitrification, Micromachining.

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Copyright Statement
© 2004 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Zeze, D. A. and Cox, D. C. and Weiss, B. L. and Silva, S. R. P. (2004) Lithography-free high aspect ratio submicron quartz columns by reactive ion etching. Applied physics letters., 84 (8). pp.1362-1364 and may be found at http://dx.doi.org/10.1063/1.1647280





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