Conical recessed gold microelectrode arrays produced during photolithographic methods: characterisation and causes

Aguiar, F.A; Gallant, A.J.; Rosamond, M.C.; Rhodes, A.; Wood, D.; Kataky, R.

doi:10.1016/j.elecom.2006.11.023

Conical recessed gold microelectrode arrays produced during photolithographic methods: characterisation and causes

Aguiar, F.A; Gallant, A.J.; Rosamond, M.C.; Rhodes, A.; Wood, D.; Kataky, R.

Authors

F.A Aguiar

A.J. Gallant

M.C. Rosamond

A. Rhodes

D. Wood

Professor Ritu Kataky ritu.kataky@durham.ac.uk
Professor

Abstract

In this work, surface imaging techniques such as scanning Kelvin nanoprobe (SKN), scanning electron microscopy (SEM) and white light interferometer microscopy show that conical recessed electrodes with gradient potential along the recessed walls are formed during standard photolithographic methods for producing microelectrode arrays. The experimental behaviour of these electrode arrays fits very well with the numerical solution using optimal quasi-conformal mappings proposed recently by Amatore and co-workers [C. Amatore, A. Oleinick, I. Svir, J. Electroanal. Chem. 597 (2006) 69; C. Amatore, A. Oleinick, I. Svir, J. Electroanal. Chem. 597 (2006) 77]. The possible reasons for the formation of conical recesses are discussed.

Citation

Aguiar, F., Gallant, A., Rosamond, M., Rhodes, A., Wood, D., & Kataky, R. (2007). Conical recessed gold microelectrode arrays produced during photolithographic methods: characterisation and causes. Electrochemistry Communications, 9(5), 879-885. https://doi.org/10.1016/j.elecom.2006.11.023

Journal Article Type	Article
Publication Date	2007-05
Deposit Date	Apr 25, 2007
Journal	Electrochemistry Communications
Print ISSN	1388-2481
Publisher	Elsevier
Peer Reviewed	Peer Reviewed
Volume	9
Issue	5
Pages	879-885
DOI	https://doi.org/10.1016/j.elecom.2006.11.023
Keywords	Microelectrodes, Arrays, Scanning Kelvin nanoprobe, Scanning electron microscopy, Conical recessed.