The role of fabrication techniques on the performance of widely tunable micromachined capacitors

Gallant, A.J.; Wood, D.

doi:10.1016/j.sna.2003.07.006

The role of fabrication techniques on the performance of widely tunable micromachined capacitors

Gallant, A.J.; Wood, D.

Authors

Professor Andrew Gallant a.j.gallant@durham.ac.uk
Professor

D. Wood

Abstract

Coventorware 2001.1® is used to identify key vertical dimensions for the low voltage operation of a two-gap widely tunable capacitor. Using identical masking stages, two varieties of tunable capacitor are presented. Nickel structures are demonstrated which have a tuning ratio of 5.1:1 from an initial capacitance of 0.7 pF. Gold devices exhibit a tuning ratio of 7.3:1 from an initial capacitance of 1.5 pF. These are the most widely tunable devices reported to date.

Citation

Gallant, A., & Wood, D. (2004). The role of fabrication techniques on the performance of widely tunable micromachined capacitors. Sensors and Actuators A: Physical, 110(1-3), 423-431. https://doi.org/10.1016/j.sna.2003.07.006

Journal Article Type	Article
Publication Date	2004-02
Deposit Date	Apr 23, 2008
Journal	Sensors and Actuators A: Physical
Print ISSN	0924-4247
Publisher	Elsevier
Peer Reviewed	Peer Reviewed
Volume	110
Issue	1-3
Pages	423-431
DOI	https://doi.org/10.1016/j.sna.2003.07.006
Keywords	RF-MEMS, Varactor, Pull-in, Electroplating, Tuning-range, MEMS.