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The role of fabrication techniques on the performance of widely tunable micromachined capacitors.

Gallant, A. J. and Wood, D. (2004) 'The role of fabrication techniques on the performance of widely tunable micromachined capacitors.', Sensors and actuators A : physical., 110 (1-3). pp. 423-431.

Abstract

Coventorware 2001.1® is used to identify key vertical dimensions for the low voltage operation of a two-gap widely tunable capacitor. Using identical masking stages, two varieties of tunable capacitor are presented. Nickel structures are demonstrated which have a tuning ratio of 5.1:1 from an initial capacitance of 0.7 pF. Gold devices exhibit a tuning ratio of 7.3:1 from an initial capacitance of 1.5 pF. These are the most widely tunable devices reported to date.

Item Type:Article
Additional Information:Selected Papers from Eurosensors XVI Prague, Czech Republic Prague, Czech Republic, 15 September - 18 September 2002 Edited by P.J. French
Keywords:RF-MEMS, Varactor, Pull-in, Electroplating, Tuning-range, MEMS.
Full text:Full text not available from this repository.
Publisher Web site:http://dx.doi.org/10.1016/j.sna.2003.07.006
Record Created:23 Apr 2008
Last Modified:08 Apr 2009 16:21

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