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Photolithographic Patterning of Bi-Helical Tracks onto Conical Substrates

Purvis, Alan; McWilliam, Richard; Johnson, Simon; Seed, N.; Williams, Gavin; Maiden, Andrew; Ivey, Peter

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Authors

Richard McWilliam

Simon Johnson

N. Seed

Gavin Williams

Andrew Maiden

Peter Ivey



Abstract

We demonstrate the direct photolithographic patterning of a grossly non-planar substrate by creating 62 micron helical tracks on a 22 mm high cone. The projection of focused light on to the three dimensional surface is achieved using a computer generated hologram (CGH) suitably illuminated so as to create the required pattern on the photoresist coated surface. The approach adopted forms the basis of a novel method for the patterning of non-planar structures. We address the key challenges encountered for the implementation of holographic photolithography in three dimensions, including mask design and manufacture, exposure compensation, mask alignment and chemical processing. Control of line width and resolution over the non-planar surface is critical. We describe the methods adopted and critically assess the structures created by this process. The bi-helical cone is representative of a broadband, high frequency coil like structure, known in wireless communications as a log-periodic antenna.

Citation

Purvis, A., McWilliam, R., Johnson, S., Seed, N., Williams, G., Maiden, A., & Ivey, P. (2007). Photolithographic Patterning of Bi-Helical Tracks onto Conical Substrates. Journal of Micro/Nanopatterning, Materials, and Metrology, 6(4), https://doi.org/10.1117/1.2824377

Journal Article Type Article
Online Publication Date Dec 1, 2007
Publication Date Dec 1, 2007
Deposit Date Oct 10, 2008
Publicly Available Date Mar 29, 2024
Journal Journal of Micro/Nanolithography, MEMS, and MOEMS
Print ISSN 1932-5150
Electronic ISSN 1932-5134
Publisher Society of Photo-optical Instrumentation Engineers
Peer Reviewed Peer Reviewed
Volume 6
Issue 4
DOI https://doi.org/10.1117/1.2824377
Keywords Holography, Lithography, Log-periodic antennas.
Publisher URL http://spie.org/x865.xml

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Copyright Statement
Copyright 2007 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.





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