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A laser beam photolithographic system for integrated optics applications.

Andriani, P. and de Pascale, O. and Lepore, M. (1989) 'A laser beam photolithographic system for integrated optics applications.', Applied physics communications., 9 (3). pp. 203-219.


Item Type:Article
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Record Created:23 Aug 2010 13:20
Last Modified:06 Sep 2010 15:22

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