P. Andriani
A laser beam photolithographic system for integrated optics applications
Andriani, P.; de Pascale, O.; Lepore, M.
Authors
O. de Pascale
M. Lepore
Citation
Andriani, P., de Pascale, O., & Lepore, M. (1989). A laser beam photolithographic system for integrated optics applications. Applied physics communications, 9(3), 203-219
| Journal Article Type | Article |
|---|---|
| Publication Date | Jan 1, 1989 |
| Deposit Date | Jun 24, 2010 |
| Journal | Applied physics communications. |
| Print ISSN | 0277-9374 |
| Publisher | Dekker |
| Peer Reviewed | Peer Reviewed |
| Volume | 9 |
| Issue | 3 |
| Pages | 203-219 |
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