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A radiation model of a rapid thermal processing system.

Wacher, Abigail and Seymour, Brian (2011) 'A radiation model of a rapid thermal processing system.', Mathematics-in-industry case studies., 3 . pp. 1-18.

Abstract

A model of the radiative heat transfer that takes place in an axially symmetric rapid thermal processing chamber is presented. The model is derived using the theory of shape factors, and is used to predict how cham- ber geometry and materials aect temperature uniformity on the processed silicon wafer. Using a series of numerical experiments we predict the eects on the temperature uniformity of the size and re ectivity of the showerhead, the guard ring, and the chamber height.

Item Type:Article
Keywords:Radiation, Modelling, Rapid Thermal Processing, Indus- trial mathematical modelling.
Full text:PDF - Published Version (294Kb)
Status:Peer-reviewed
Publisher Web site:http://micsjournal.ca/index.php/mics/article/view/35
Record Created:27 Jan 2011 11:20
Last Modified:28 Oct 2011 10:08

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