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Three-dimensional holographic lithography by an iterative algorithm

Cowling, J.J.; Williams, G.L.; Purvis, A.; McWilliam, R.; Toriz-Garcia, J.J.; Seed, N.L.; Soulard, F.B.; Ivey, P.A.

Three-dimensional holographic lithography by an iterative algorithm Thumbnail


Authors

J.J. Cowling

G.L. Williams

R. McWilliam

J.J. Toriz-Garcia

N.L. Seed

F.B. Soulard

P.A. Ivey



Abstract

We have applied an iterative algorithm for hologram design with multiple output image planes arranged in close proximity to create continuous patterns within an imaging volume. These holograms have been designed for photolithography on three-dimensional surfaces. The influence of simulated image plane separation on the final image, and its suitability for lithography, is assessed. Results are presented and the most suitable case is demonstrated experimentally.

Citation

Cowling, J., Williams, G., Purvis, A., McWilliam, R., Toriz-Garcia, J., Seed, N., …Ivey, P. (2011). Three-dimensional holographic lithography by an iterative algorithm. Optics Letters, 36(13), 2495-2497. https://doi.org/10.1364/ol.36.002495

Journal Article Type Article
Publication Date Jul 1, 2011
Deposit Date Oct 6, 2010
Publicly Available Date Sep 3, 2013
Journal Optics Letters
Print ISSN 0146-9592
Electronic ISSN 1539-4794
Publisher Optica
Peer Reviewed Peer Reviewed
Volume 36
Issue 13
Pages 2495-2497
DOI https://doi.org/10.1364/ol.36.002495

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Copyright Statement
© 2011 The Optical Society. This paper was published in Optics letters and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/OL.36.002495. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.





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