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Modelling and experimental verification of heat dissipation mechanisms in an SU-8 electrothermal microgripper.

Solano, B. and Merrell, J. and Gallant, A. J. and Wood, D. (2014) 'Modelling and experimental verification of heat dissipation mechanisms in an SU-8 electrothermal microgripper.', Microelectronic engineering., 124 . pp. 90-93.


Within this work, a microgripper based on a hot–cold arm principle was tested to give a greater understanding of the associated heat dissipation methods. Experiments were conducted in air at atmospheric and sub-atmospheric pressure, and in helium, argon and helium at sub-atmospheric pressure. The change in deflection, when using gases with different thermal conductivities and at varying pressures showed the significance of conduction through the atmosphere. The experimental results were found to verify a theoretical model created previously by this group, and a further model developed independently; both predicted the deflection that a given current would cause.

Item Type:Article
Keywords:Microgripper, Heat dissipation, Thermal imaging, Electrothermal, SU-8.
Full text:(AM) Accepted Manuscript
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Publisher statement:NOTICE: this is the author’s version of a work that was accepted for publication in Microelectronic Engineering. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in Microelectronic Engineering, 124, 25 July 2014, 10.1016/j.mee.2014.06.002.
Date accepted:02 June 2014
Date deposited:01 June 2015
Date of first online publication:July 2014
Date first made open access:No date available

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