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Simple de-embedding and simulation technique to find permittivity with a THz vector network analyser.

Hammler, J. and Gallant, A.J. and Balocco, C. (2015) 'Simple de-embedding and simulation technique to find permittivity with a THz vector network analyser.', in 40th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 23-28 August 2015, Hong Kong. Piscataway: IEEE, pp. 1-2.


A simple and fast method for measuring the dielectric constant with a THz vector network analyser (VNA) has been developed. A numeric de-embedding technique removes free-space propagation effects, then simulation of Maxwell's equations simultaneously fits both permittivity and thickness to measured scattering parameters. Results are presented for semiconductor and dielectric samples within the frequency range 750 GHz to 1.1 THz, showing excellent agreement with prior work. A statistical analysis of uncertainty is performed, which demonstrates the robustness of our method.

Item Type:Book chapter
Keywords:Frequency measurement, Permittivity, Permittivity measurement, Scattering parameters, Semiconductor device measurement, Thickness measurement.
Full text:(AM) Accepted Manuscript
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Publisher statement:© 2015 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
Date accepted:23 August 2015
Date deposited:26 January 2016
Date of first online publication:August 2015
Date first made open access:No date available

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