A robust, fine pitch probe card

Rosamond, M.C.; Gallant, A.J.; Wood, D.

doi:10.1016/j.proche.2009.07.197

A robust, fine pitch probe card

Rosamond, M.C.; Gallant, A.J.; Wood, D.

Authors

M.C. Rosamond

Professor Andrew Gallant a.j.gallant@durham.ac.uk
Professor

D. Wood

Contributors

J Brugger
Editor

D Briand
Editor

Abstract

A new type of probe card is described which consists of inclined nickel cantilevers formed on top of a three dimensional PDMS layer. A prototype card has been built with an in-line pitch of 23 μm. The presence of a PDMS layer beneath the cantilevers creates mechanically robust probes. The probes can apply up to 100 mN contact force and be deflected up to 40 μm without damage. Typical contact resistances of less than 5 Ω against gold and 15 Ω against copper are reported. The leakage current between adjacent probes is less than 1 nA measured at 100 V.

Citation

Rosamond, M., Gallant, A., & Wood, D. (2009). A robust, fine pitch probe card. Procedia chemistry, 1(1), 792-795. https://doi.org/10.1016/j.proche.2009.07.197

Journal Article Type	Article
Publication Date	Sep 4, 2009
Deposit Date	Oct 1, 2010
Publicly Available Date	Apr 18, 2016
Journal	Procedia Chemistry
Publisher	Elsevier
Peer Reviewed	Peer Reviewed
Volume	1
Issue	1
Pages	792-795
DOI	https://doi.org/10.1016/j.proche.2009.07.197
Keywords	Probe card, PDMS, Greyscale lithography, Fine pitch, Robust.