We use cookies to ensure that we give you the best experience on our website. By continuing to browse this repository, you give consent for essential cookies to be used. You can read more about our Privacy and Cookie Policy.

Durham Research Online
You are in:

A robust, fine pitch probe card.

Rosamond, M. C. and Gallant, A. J. and Wood, D. (2009) 'A robust, fine pitch probe card.', Procedia chemistry., 1 (1). pp. 792-795.


A new type of probe card is described which consists of inclined nickel cantilevers formed on top of a three dimensional PDMS layer. A prototype card has been built with an in-line pitch of 23 μm. The presence of a PDMS layer beneath the cantilevers creates mechanically robust probes. The probes can apply up to 100 mN contact force and be deflected up to 40 μm without damage. Typical contact resistances of less than 5 Ω against gold and 15 Ω against copper are reported. The leakage current between adjacent probes is less than 1 nA measured at 100 V.

Item Type:Article
Additional Information:Proceedings of the 23rd Eurosensors XXIII conference, Lausanne, Switzerland 6-9 September 2009
Keywords:Probe card, PDMS, Greyscale lithography, Fine pitch, Robust.
Full text:(VoR) Version of Record
Available under License - Creative Commons Attribution Non-commercial No Derivatives.
Download PDF
Publisher Web site:
Publisher statement:© 2009 Published by Elsevier B.V. Open access under CC BY-NC-ND license.
Date accepted:No date available
Date deposited:18 April 2016
Date of first online publication:September 2009
Date first made open access:No date available

Save or Share this output

Look up in GoogleScholar