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Direct growth of Si nanowires on flexible organic substrates

Tian (田琳), Lin; Di Mario, Lorenzo; Minotti, Antonio; Tiburzi, Giorgio; Mendis, Budhika G.; Zeze, Dagou A.; Martelli, Faustino

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Authors

Lin Tian (田琳)

Lorenzo Di Mario

Antonio Minotti

Giorgio Tiburzi

Faustino Martelli



Abstract

A key characteristic of semiconductor nanowires (NWs) is that they grow on any substrate that can withstand the growth conditions, paving the way for their use in flexible electronics. We report on the direct growth of crystalline silicon nanowires on polyimide substrates. The Si NWs are grown by plasma-enhanced chemical vapor deposition, which allows the growth to proceed at temperatures low enough to be compatible with plastic substrates (350 °C), where gold or indium are used as growth seeds. In is particularly interesting as the seed not only because it leads to a better NW crystal quality but also because it overcomes a core problem induced by the use of Au in silicon processing, i.e. Au creates deep carrier traps when incorporated in the nanowires.

Citation

Tian (田琳), L., Di Mario, L., Minotti, A., Tiburzi, G., Mendis, B. G., Zeze, D. A., & Martelli, F. (2016). Direct growth of Si nanowires on flexible organic substrates. Nanotechnology, 27(22), Article 225601. https://doi.org/10.1088/0957-4484/27/22/225601

Journal Article Type Article
Acceptance Date Mar 31, 2016
Online Publication Date Apr 21, 2016
Publication Date Jun 3, 2016
Deposit Date May 25, 2016
Publicly Available Date Apr 21, 2017
Journal Nanotechnology
Print ISSN 0957-4484
Electronic ISSN 1361-6528
Publisher IOP Publishing
Peer Reviewed Peer Reviewed
Volume 27
Issue 22
Article Number 225601
DOI https://doi.org/10.1088/0957-4484/27/22/225601

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Copyright Statement
This is an author-created, un-copyedited version of an article published in Nanotechnology. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at http://dx.doi.org/10.1088/0957-4484/27/22/225601





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