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Density and Energy Distribution of Interface States in the Grain Boundaries of Polysilicon Nanowire

Amit, Iddo; Englander, Danny; Horvitz, Dror; Sasson, Yaniv; Rosenwaks, Yossi

Density and Energy Distribution of Interface States in the Grain Boundaries of Polysilicon Nanowire Thumbnail


Authors

Danny Englander

Dror Horvitz

Yaniv Sasson

Yossi Rosenwaks



Abstract

Wafer-scale fabrication of semiconductor nanowire devices is readily facilitated by lithography-based top-down fabrication of polysilicon nanowire (P-SiNW) arrays. However, free carrier trapping at the grain boundaries of polycrystalline materials drastically changes their properties. We present here transport measurements of P-SiNW array devices coupled with Kelvin probe force microscopy at different applied biases. By fitting the measured P-SiNW surface potential using electrostatic simulations, we extract the longitudinal dopant distribution along the nanowires as well as the density of grain boundaries interface states and their energy distribution within the band gap.

Citation

Amit, I., Englander, D., Horvitz, D., Sasson, Y., & Rosenwaks, Y. (2014). Density and Energy Distribution of Interface States in the Grain Boundaries of Polysilicon Nanowire. Nano Letters, 14(11), 6190-6194. https://doi.org/10.1021/nl5024468

Journal Article Type Article
Acceptance Date Jun 30, 2014
Online Publication Date Oct 13, 2014
Publication Date Nov 12, 2014
Deposit Date Jul 5, 2018
Publicly Available Date Jul 31, 2018
Journal Nano Letters
Print ISSN 1530-6984
Electronic ISSN 1530-6992
Publisher American Chemical Society
Peer Reviewed Peer Reviewed
Volume 14
Issue 11
Pages 6190-6194
DOI https://doi.org/10.1021/nl5024468

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Copyright Statement
This document is the Accepted Manuscript version of a Published Work that appeared in final form in Nano Letters, copyright © American Chemical Society after peer review and technical editing by the publisher. To access the final edited and published work see https://doi.org/10.1021/nl5024468.





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