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Thin film flexible/bendable acoustic wave devices : evolution, hybridization and decoupling of multiple acoustic wave modes.

Tao, R. and Wang, W.B. and Luo, J.T. and Hasan, S. and Torun, H. and Canyelles-Pericas, P. and Zhou, J. and Xuan, W.P. and Cooke, M. and Gibson, D. and Wu, Q. and Ng, W.P. and Luo, J.K. and Fu, Y.Q. (2019) 'Thin film flexible/bendable acoustic wave devices : evolution, hybridization and decoupling of multiple acoustic wave modes.', Surface and coatings technology., 357 . pp. 587-594.


Based on theoretical analysis, finite element simulation and experimental verifications, we have systematically investigated evolution, hybridization and decoupling of multiple acoustic wave modes and vibration patterns generated from piezoelectric film acoustic wave devices fabricated on flexible thin foils/plates. ZnO piezoelectric films deposited on flexible and bendable Al foil and plates were selected for this particular study. The ZnO/Al acoustic wave devices were chosen with wavelengths varied from 12 to 800 μm, ZnO film thickness from 2 to 10 μm and Al foil/plate thickness from 10 to 600 μm. Multiple acoustic wave modes (including symmetrical and asymmetrical Lamb waves, Rayleigh waves and higher harmonic/Sezawa wave modes) were generated, hybridized occasionally with each other, and then easily decoupled by changing the ratios of the substrate/film thicknesses to wavelengths. Ratios between device wavelength and substrate/film thickness have been identified to be the dominant parameter in determining the evolution and hybridization of multiple wave modes and their vibration patterns, which provide useful design guidance for both sensing and microfluidic applications using these flexible and bendable acoustic wave devices.

Item Type:Article
Full text:(AM) Accepted Manuscript
Available under License - Creative Commons Attribution Non-commercial No Derivatives.
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Publisher statement:© 2018 This manuscript version is made available under the CC-BY-NC-ND 4.0 license
Date accepted:16 October 2018
Date deposited:23 October 2018
Date of first online publication:17 October 2018
Date first made open access:17 October 2019

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