Gallant, A. J. and Wood, D. (2004) 'The role of fabrication techniques on the performance of widely tunable micromachined capacitors.', Sensors and actuators A : physical., 110 (1-3). pp. 423-431.
Coventorware 2001.1® is used to identify key vertical dimensions for the low voltage operation of a two-gap widely tunable capacitor. Using identical masking stages, two varieties of tunable capacitor are presented. Nickel structures are demonstrated which have a tuning ratio of 5.1:1 from an initial capacitance of 0.7 pF. Gold devices exhibit a tuning ratio of 7.3:1 from an initial capacitance of 1.5 pF. These are the most widely tunable devices reported to date.
|Additional Information:||Selected Papers from Eurosensors XVI Prague, Czech Republic Prague, Czech Republic, 15 September - 18 September 2002 Edited by P.J. French|
|Keywords:||RF-MEMS, Varactor, Pull-in, Electroplating, Tuning-range, MEMS.|
|Full text:||Full text not available from this repository.|
|Publisher Web site:||http://dx.doi.org/10.1016/j.sna.2003.07.006|
|Date accepted:||No date available|
|Date deposited:||No date available|
|Date of first online publication:||February 2004|
|Date first made open access:||No date available|
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