Gallant, A. J. and Wood, D. (2004) 'The role of fabrication techniques on the performance of widely tunable micromachined capacitors.', Sensors and actuators A : physical., 110 (1-3). pp. 423-431.
Abstract
Coventorware 2001.1® is used to identify key vertical dimensions for the low voltage operation of a two-gap widely tunable capacitor. Using identical masking stages, two varieties of tunable capacitor are presented. Nickel structures are demonstrated which have a tuning ratio of 5.1:1 from an initial capacitance of 0.7 pF. Gold devices exhibit a tuning ratio of 7.3:1 from an initial capacitance of 1.5 pF. These are the most widely tunable devices reported to date.
| Item Type: | Article |
|---|---|
| Additional Information: | Selected Papers from Eurosensors XVI Prague, Czech Republic Prague, Czech Republic, 15 September - 18 September 2002 Edited by P.J. French |
| Keywords: | RF-MEMS, Varactor, Pull-in, Electroplating, Tuning-range, MEMS. |
| Full text: | Full text not available from this repository. |
| Publisher Web site: | http://dx.doi.org/10.1016/j.sna.2003.07.006 |
| Date accepted: | No date available |
| Date deposited: | No date available |
| Date of first online publication: | February 2004 |
| Date first made open access: | No date available |
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