Frozanpoor, Iman and Cooke, Michael and Alvarez-Ruiz, Diana and Ambukan, Vibin and Gallant, Andrew and Balocco, Claudio (2021) 'Tilting micromirror platform based on liquid dielectrophoresis.', Sensors and Actuators A: Physical, 332 (2). p. 113177.
Abstract
This study presents an electrically actuated tilting micro platform based on liquid dielectrophoresis with three axes movement using three droplets situated 120° apart from each other. The interdigitated electrodes produce a non-uniform electric field that generates a body force. The dielectrophoretic mechanism is responsive within at least 30 ms, and it eliminates the solid-solid contact. The tilting platform enabled an angular coverage up to 0.9° (±0.02°), with a maximum displacement of 120 µm. The tilting micromirror platform has beam steering characteristics suitable for various optical applications. The actuating platform sensor is a cost-effective and simple alternative method to study liquid dielectrophoresis without measuring the droplet contact angle. Furthermore, the unique configuration without any solid-solid contact offers a potential improvement for applications in optics, actuators, and other conventional microelectromechanical systems.
| Item Type: | Article |
|---|---|
| Full text: | (P) Proof Available under License - Creative Commons Attribution 4.0. Download PDF (4199Kb) |
| Status: | Peer-reviewed |
| Publisher Web site: | https://doi.org/10.1016/j.sna.2021.113177 |
| Publisher statement: | © 2021 The Author(s). Published by Elsevier B.V. CC_BY_4.0 |
| Date accepted: | 12 October 2021 |
| Date deposited: | 25 November 2021 |
| Date of first online publication: | 07 December 2021 |
| Date first made open access: | 25 November 2021 |
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