We use cookies to ensure that we give you the best experience on our website. By continuing to browse this repository, you give consent for essential cookies to be used. You can read more about our Privacy and Cookie Policy.

Durham Research Online
You are in:

Tilting micromirror platform based on liquid dielectrophoresis

Frozanpoor, Iman and Cooke, Michael and Alvarez-Ruiz, Diana and Ambukan, Vibin and Gallant, Andrew and Balocco, Claudio (2021) 'Tilting micromirror platform based on liquid dielectrophoresis.', Sensors and Actuators A: Physical, 332 (2). p. 113177.


This study presents an electrically actuated tilting micro platform based on liquid dielectrophoresis with three axes movement using three droplets situated 120° apart from each other. The interdigitated electrodes produce a non-uniform electric field that generates a body force. The dielectrophoretic mechanism is responsive within at least 30 ms, and it eliminates the solid-solid contact. The tilting platform enabled an angular coverage up to 0.9° (±0.02°), with a maximum displacement of 120 µm. The tilting micromirror platform has beam steering characteristics suitable for various optical applications. The actuating platform sensor is a cost-effective and simple alternative method to study liquid dielectrophoresis without measuring the droplet contact angle. Furthermore, the unique configuration without any solid-solid contact offers a potential improvement for applications in optics, actuators, and other conventional microelectromechanical systems.

Item Type:Article
Full text:(P) Proof
Available under License - Creative Commons Attribution 4.0.
Download PDF
Publisher Web site:
Publisher statement:© 2021 The Author(s). Published by Elsevier B.V. CC_BY_4.0
Date accepted:12 October 2021
Date deposited:25 November 2021
Date of first online publication:07 December 2021
Date first made open access:25 November 2021

Save or Share this output

Look up in GoogleScholar